JPS6138913Y2 - - Google Patents

Info

Publication number
JPS6138913Y2
JPS6138913Y2 JP11612683U JP11612683U JPS6138913Y2 JP S6138913 Y2 JPS6138913 Y2 JP S6138913Y2 JP 11612683 U JP11612683 U JP 11612683U JP 11612683 U JP11612683 U JP 11612683U JP S6138913 Y2 JPS6138913 Y2 JP S6138913Y2
Authority
JP
Japan
Prior art keywords
turntable
wafer
vapor phase
phase growth
growth apparatus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP11612683U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6025750U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP11612683U priority Critical patent/JPS6025750U/ja
Publication of JPS6025750U publication Critical patent/JPS6025750U/ja
Application granted granted Critical
Publication of JPS6138913Y2 publication Critical patent/JPS6138913Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)
JP11612683U 1983-07-25 1983-07-25 気相成長装置 Granted JPS6025750U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP11612683U JPS6025750U (ja) 1983-07-25 1983-07-25 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP11612683U JPS6025750U (ja) 1983-07-25 1983-07-25 気相成長装置

Publications (2)

Publication Number Publication Date
JPS6025750U JPS6025750U (ja) 1985-02-21
JPS6138913Y2 true JPS6138913Y2 (en]) 1986-11-08

Family

ID=30267820

Family Applications (1)

Application Number Title Priority Date Filing Date
JP11612683U Granted JPS6025750U (ja) 1983-07-25 1983-07-25 気相成長装置

Country Status (1)

Country Link
JP (1) JPS6025750U (en])

Also Published As

Publication number Publication date
JPS6025750U (ja) 1985-02-21

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